-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 MbmuChdew6PVNtoopU9UXppJ4SmiMHvFsKjCzHc2vvDZt2M3XhxcpXz3XD6xPL5S
 2aYnvukxi/ETX6jp2BDVwQ==

<SEC-DOCUMENT>0001236761-09-000004.txt : 20091113
<SEC-HEADER>0001236761-09-000004.hdr.sgml : 20091113
<ACCEPTANCE-DATETIME>20091113144824
ACCESSION NUMBER:		0001236761-09-000004
CONFORMED SUBMISSION TYPE:	D
PUBLIC DOCUMENT COUNT:		1
ITEM INFORMATION:		Rule 506
FILED AS OF DATE:		20091113
DATE AS OF CHANGE:		20091113
EFFECTIVENESS DATE:		20091113

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			NEXX SYSTEMS INC
		CENTRAL INDEX KEY:			0001236761
		IRS NUMBER:				000000000
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		D
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	021-55650
		FILM NUMBER:		091181011

	BUSINESS ADDRESS:	
		STREET 1:		900 MIDDLESEX TURNPIKE, BLDG. 6
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
		BUSINESS PHONE:		9782844980

	MAIL ADDRESS:	
		STREET 1:		900 MIDDLESEX TURNPIKE, BLDG. 6
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
</SEC-HEADER>
<DOCUMENT>
<TYPE>D
<SEQUENCE>1
<FILENAME>primary_doc.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<edgarSubmission>

    <schemaVersion>X0603</schemaVersion>

    <submissionType>D</submissionType>

    <testOrLive>LIVE</testOrLive>

    <primaryIssuer>
        <cik>0001236761</cik>
        <entityName>NEXX SYSTEMS INC</entityName>
        <issuerAddress>
            <street1>900 MIDDLESEX TURNPIKE, BLDG. 6</street1>
            <city>BILLERICA</city>
            <stateOrCountry>MA</stateOrCountry>
            <zipCode>01821</zipCode>
        </issuerAddress>
        <issuerPhoneNumber>9782844980</issuerPhoneNumber>
        <jurisdictionOfInc>DELAWARE</jurisdictionOfInc>
        <issuerPreviousNameList>
            <value>None</value>
        </issuerPreviousNameList>
        <edgarPreviousNameList>
            <value>None</value>
        </edgarPreviousNameList>
        <entityType>Corporation</entityType>
        <yearOfInc>
            <overFiveYears>true</overFiveYears>
        </yearOfInc>
    </primaryIssuer>

    <relatedPersonsList>
        <relatedPersonInfo>
            <relatedPersonName>
                <firstName>Stanley</firstName>
                <lastName>Piekos</lastName>
            </relatedPersonName>
            <relatedPersonAddress>
                <street1>900 Middlesex Turnpike, Bldg. 6</street1>
                <city>Billerica</city>
                <stateOrCountry>MA</stateOrCountry>
                <zipCode>01821</zipCode>
            </relatedPersonAddress>
            <relatedPersonRelationshipList>
                <relationship>Executive Officer</relationship>
            </relatedPersonRelationshipList>
            <relationshipClarification></relationshipClarification>
        </relatedPersonInfo>
        <relatedPersonInfo>
            <relatedPersonName>
                <firstName>Robert</firstName>
                <lastName>Deuster</lastName>
            </relatedPersonName>
            <relatedPersonAddress>
                <street1>1791 Deere Avenue</street1>
                <city>Irvine</city>
                <stateOrCountry>CA</stateOrCountry>
                <zipCode>92606</zipCode>
            </relatedPersonAddress>
            <relatedPersonRelationshipList>
                <relationship>Director</relationship>
            </relatedPersonRelationshipList>
            <relationshipClarification></relationshipClarification>
        </relatedPersonInfo>
        <relatedPersonInfo>
            <relatedPersonName>
                <firstName>Clifford</firstName>
                <lastName>Hass</lastName>
            </relatedPersonName>
            <relatedPersonAddress>
                <street1>1600 El Camino Real, #280</street1>
                <city>Menlo Park</city>
                <stateOrCountry>CA</stateOrCountry>
                <zipCode>94025</zipCode>
            </relatedPersonAddress>
            <relatedPersonRelationshipList>
                <relationship>Director</relationship>
            </relatedPersonRelationshipList>
            <relationshipClarification></relationshipClarification>
        </relatedPersonInfo>
        <relatedPersonInfo>
            <relatedPersonName>
                <firstName>Bruce</firstName>
                <lastName>Rhine</lastName>
            </relatedPersonName>
            <relatedPersonAddress>
                <street1>55975 Hashknife</street1>
                <city>Bend</city>
                <stateOrCountry>OR</stateOrCountry>
                <zipCode>97707</zipCode>
            </relatedPersonAddress>
            <relatedPersonRelationshipList>
                <relationship>Director</relationship>
            </relatedPersonRelationshipList>
            <relationshipClarification></relationshipClarification>
        </relatedPersonInfo>
        <relatedPersonInfo>
            <relatedPersonName>
                <firstName>Douglas</firstName>
                <lastName>Norby</lastName>
            </relatedPersonName>
            <relatedPersonAddress>
                <street1>12169 Hilltop Drive</street1>
                <city>Los Altos Hills</city>
                <stateOrCountry>CA</stateOrCountry>
                <zipCode>94024</zipCode>
            </relatedPersonAddress>
            <relatedPersonRelationshipList>
                <relationship>Director</relationship>
            </relatedPersonRelationshipList>
            <relationshipClarification></relationshipClarification>
        </relatedPersonInfo>
        <relatedPersonInfo>
            <relatedPersonName>
                <firstName>Carl</firstName>
                <lastName>Erbi</lastName>
            </relatedPersonName>
            <relatedPersonAddress>
                <street1>2223 Avenida De La Playa, Suite 300</street1>
                <city>La Jolla</city>
                <stateOrCountry>CA</stateOrCountry>
                <zipCode>92037</zipCode>
            </relatedPersonAddress>
            <relatedPersonRelationshipList>
                <relationship>Director</relationship>
            </relatedPersonRelationshipList>
            <relationshipClarification></relationshipClarification>
        </relatedPersonInfo>
        <relatedPersonInfo>
            <relatedPersonName>
                <firstName>Thomas</firstName>
                <lastName>Walsh</lastName>
            </relatedPersonName>
            <relatedPersonAddress>
                <street1>900 Middlesex Turnpike, Bldg. 6</street1>
                <city>Billerica</city>
                <stateOrCountry>MA</stateOrCountry>
                <zipCode>01821</zipCode>
            </relatedPersonAddress>
            <relatedPersonRelationshipList>
                <relationship>Executive Officer</relationship>
                <relationship>Director</relationship>
            </relatedPersonRelationshipList>
            <relationshipClarification></relationshipClarification>
        </relatedPersonInfo>
    </relatedPersonsList>

    <offeringData>
        <industryGroup>
            <industryGroupType>Manufacturing</industryGroupType>
        </industryGroup>
        <issuerSize>
            <revenueRange>Decline to Disclose</revenueRange>
        </issuerSize>
        <federalExemptionsExclusions>
            <item>06</item>
        </federalExemptionsExclusions>
        <typeOfFiling>
            <newOrAmendment>
                <isAmendment>false</isAmendment>
            </newOrAmendment>
            <dateOfFirstSale>
                <value>2009-10-27</value>
            </dateOfFirstSale>
        </typeOfFiling>
        <durationOfOffering>
            <moreThanOneYear>false</moreThanOneYear>
        </durationOfOffering>
        <typesOfSecuritiesOffered>
            <isEquityType>true</isEquityType>
        </typesOfSecuritiesOffered>
        <businessCombinationTransaction>
            <isBusinessCombinationTransaction>false</isBusinessCombinationTransaction>
            <clarificationOfResponse></clarificationOfResponse>
        </businessCombinationTransaction>
        <minimumInvestmentAccepted>0</minimumInvestmentAccepted>
        <salesCompensationList></salesCompensationList>
        <offeringSalesAmounts>
            <totalOfferingAmount>4000000</totalOfferingAmount>
            <totalAmountSold>4000000</totalAmountSold>
            <totalRemaining>0</totalRemaining>
            <clarificationOfResponse>Series D Convertible Preferred Stock</clarificationOfResponse>
        </offeringSalesAmounts>
        <investors>
            <hasNonAccreditedInvestors>false</hasNonAccreditedInvestors>
            <totalNumberAlreadyInvested>5</totalNumberAlreadyInvested>
        </investors>
        <salesCommissionsFindersFees>
            <salesCommissions>
                <dollarAmount>0</dollarAmount>
            </salesCommissions>
            <findersFees>
                <dollarAmount>0</dollarAmount>
            </findersFees>
            <clarificationOfResponse></clarificationOfResponse>
        </salesCommissionsFindersFees>
        <useOfProceeds>
            <grossProceedsUsed>
                <dollarAmount>0</dollarAmount>
            </grossProceedsUsed>
            <clarificationOfResponse></clarificationOfResponse>
        </useOfProceeds>
        <signatureBlock>
            <authorizedRepresentative>false</authorizedRepresentative>
            <signature>
                <issuerName>NEXX SYSTEMS INC</issuerName>
                <signatureName>Neil H. Aronson</signatureName>
                <nameOfSigner>Neil H. Aronson</nameOfSigner>
                <signatureTitle>Asst. Secretary</signatureTitle>
                <signatureDate>2009-11-10</signatureDate>
            </signature>
        </signatureBlock>
    </offeringData>
</edgarSubmission>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----